Scanning probe lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5037 I, Issue , 2003, Pages 162-167

  Nyamjav, Dorjderem ^a   Ivanisevic, Albena ^a,b  

^a PURDUE UNIVERSITY   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

Atomic force microscopy; Nanolithography; Polymers

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON DEVICE MANUFACTURE; ELECTROSTATICS; MAGNETIC MATERIALS; NANOTECHNOLOGY; POLYMERS; SUBSTRATES; SURFACES;

CHARGED MAGNETIC PARTICLES; COATED MAGNETIC PARTICLES; DIP-PEN NANOLITHOGRAPHY; ELECTROSTATIC INTERACTIONS; LAYER BY LAYER; SCANNING PROBE LITHOGRAPHY; SURFACE BLUE PRINT;

LITHOGRAPHY;

EID: 0141501415     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484991     Document Type: Conference Paper

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