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Volumn 3, Issue 7, 2006, Pages 173-181

How trace-analytical techniques contribute to the research and development of Ge and III/V semiconductor devices

Author keywords

[No Author keywords available]

Indexed keywords

GERMANIUM; INTEGRATED CIRCUIT LAYOUT; MICROELECTRONICS; SILICON; SUBSTRATES; TRACE ANALYSIS;

EID: 33846989008     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2355806     Document Type: Conference Paper
Times cited : (4)

References (10)
  • 1
    • 0036650673 scopus 로고    scopus 로고
    • P.M. Zeitzoff, R.W. Murto and H.R. Huff, Solid State Technology, July issue, 71 (2002).
    • P.M. Zeitzoff, R.W. Murto and H.R. Huff, Solid State Technology, July issue, 71 (2002).
  • 3
    • 20244383594 scopus 로고    scopus 로고
    • B. De Jaeger, M. Houssa, A. Satta, S. Kubicek, P. Verheyen, J. Van Steenbergen, J. Croon, B. Kaczer, S. Van Elshocht, A. Delabie, E. Kunnen, E. Sleeckx, I. Teerlinck, R. Lindsay, T. Schram, T. Chiarella, R. Degraeve, T. Conard, J. Poortmans, G. Winderickx, W. Boullart, M. Schaekers, P. Mertens, M. Caymax, W. Vandervorst, E. Van Moorhem, S. Biesemans, K. De Meyer, L. Ragnarsson, S. Lee, G. Kota, G. Raskin, P. Mijlemans, J.L. Autran, V. Afanas'ev, A. Stesmans, M. Meuris, and M. Heyns, in Proceedings of the 34th European Solid-State Device Research Conference, R.P. Mertens, C.L. Claeys, Editors, p. 189, IEEE, Piscataway, New York, USA (2004).
    • B. De Jaeger, M. Houssa, A. Satta, S. Kubicek, P. Verheyen, J. Van Steenbergen, J. Croon, B. Kaczer, S. Van Elshocht, A. Delabie, E. Kunnen, E. Sleeckx, I. Teerlinck, R. Lindsay, T. Schram, T. Chiarella, R. Degraeve, T. Conard, J. Poortmans, G. Winderickx, W. Boullart, M. Schaekers, P. Mertens, M. Caymax, W. Vandervorst, E. Van Moorhem, S. Biesemans, K. De Meyer, L. Ragnarsson, S. Lee, G. Kota, G. Raskin, P. Mijlemans, J.L. Autran, V. Afanas'ev, A. Stesmans, M. Meuris, and M. Heyns, in Proceedings of the 34th European Solid-State Device Research Conference, R.P. Mertens, C.L. Claeys, Editors, p. 189, IEEE, Piscataway, New York, USA (2004).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.