Hall stratum filtered cathodic arc source for carbon plasma

Surface and Coatings Technology

Volumn 201, Issue 13, 2007, Pages 6095-6100

  Bender, E D ^a   Zhitomirsky, V N ^b   Boxman, R L ^b  

^a LUMIKS PTI Ltd   (Israel)

^b TEL AVIV UNIVERSITY   (Israel)

Author keywords

Carbon plasma; Filtered vacuum arc deposition; Ion current; Transverse magnetic field

Indexed keywords

CARBON; CATHODES; ELECTRIC CURRENTS; IONS; MAGNETIC FIELDS; PLASMAS;

CARBON PLASMA; FILTERED VACUUM ARC DEPOSITION; HALL STRATUM; ION CURRENT; PLASMA IONS; TRANSVERSE MAGNETIC FIELD;

DEPOSITION;

CARBON; CATHODES; DEPOSITION; ELECTRIC CURRENTS; IONS; MAGNETIC FIELDS; PLASMAS;

EID: 33846785523     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.08.130     Document Type: Article

References (25)

1. Aksenov I.I., Vakula S.I., Padalka V.G., Strel'nitskii V.E., and Khoroshikh V.M. Sov. Phys. Tech. Phys. 25 (1980) 1164
2. Boxman R.L., Zhitomirsky V.N., Alterkop B., Gidalevich E., Beilis I., Keidar M., and Goldsmith S. Surf. Coat. Technol. 86-87 (1996) 243
3. Karpov D.A. Surf. Coat. Technol. 96 (1997) 22
4. Anders A. Surf. Coat. Technol. 120-121 (1999) 319
5. Martin P.J., Bendavid A., and Takikawa H. J. Vac. Sci. Technol. A, Vac. Surf. Films 17 (1999) 2351
6. Miernik K., Walkowicz J., and Bujak J. Plasmas Ions 3 (2000) 41
7. Martin P.J., and Bendavid A. Thin Solid Films 394 (2001) 1
8. Aksenov I.I., Strel'nitskij V.E., Vasilyev V.V., and Zaleskij D.Yu. Surf. Coat. Technol. 163-164 (2003) 118
9. Boxman R.L., Beilis I.I., Gidalevich E., and Zhitomirsky V.N. IEEE Trans. Plasma Sci. 33 (2005) 1618
10. Boxman R.L., and Zhitomirsky V.N. Rev. Sci. Instrum. 77 (2006) 021101
11. E.D. Bender, The Cathode-Arc Source of the Metal/Carbon Plasma with Filtration, Israeli Pat. Pending 170170, Applicant LUMIKS PTI Ltd., 09.08.2005, Jerusalem.
12. Emtage P.R., Kimblin C.W., Gorman J.G., Holmes F.A., Heberlein J.V.R., Voshall R.E., and Slade P.G. IEEE Trans. Plasma Sci. PS-8 (1980) 314
13. Gorman J.G., Kimblin C.W., Voshall R.E., Wien R.E., and Slade P.G. IEEE Trans. Power Appar. Syst. PAS-102 (1983) 257
14. Bender E.D., and Krivenko A.S. Prikladnaya Fizika 5 (1999) 33 (in Russian)
15. Bender E.D., Dimov G.I., Krivenko A.S., and Razorenov V.V. Rev. Sci. Instrum. 77 (2006) 013303
16. Kimblin C.W. J. Appl. Phys. 44 (1973) 3074
17. Yushkov G.Y., Anders A., Oks E.M., and Brown I.G. J. Appl. Phys. 88 (2000) 5618
18. Davis W.D., and Miller H.C. J. Appl. Phys. 40 (1969) 2212
19. Miller H.C. In: Boxman R.L., Martin P.J., and Sanders D.M. (Eds). Handbook of Vacuum Arc Science and Technology (1995), Noyes Publications, Park Ridge, NJ 308
20. Anders A., Anders S., and Brown I.G. Plasma Sources Sci. Technol. 4 (1995) 1
21. Schülke T., Anders A., and Siemroth P. IEEE Trans. Plasma Sci. 25 (1997) 660
22. Sanders D.M., and Anders A. Surf. Coat. Technol. 133-134 (2000) 78
23. Strel'nitskij V.E., and Aksenov I.I. Proc. XXI Int. Symp. on Discharges and Electrical Insulation in Vacuum, Yalta, Sept. 27-Oct. 1, 2004 vol. 2 (2004), IEEE, New Jersey 491
24. Timoshenko A.I., Taran V.S., Tereshin V.I., and Chechel'nitsky O.G. IEEE Trans. Plasma Sci. 33 (2005) 1636
25. Aksenov I.I. Proc. XXI Int. Symp. on Discharges and Electrical Insulation in Vacuum, Yalta, Sept. 27-Oct. 1, 2004 vol. 2 (2004), IEEE, New Jersey 467