Magnetic confinement structures in vacuum-arc plasma filtering systems

Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 2004, Pages 467-472

  Aksenov, I I ^a  

^a KHARKOV INSTITUTE OF PHYSICS AND TECHNOLOGY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE SPOTS (CS); MAGNETIC CONFINEMENT STRUCTURES; VACUUM-ARC PLASMA FILTERING SYSTEMS; VACUUM-ARC PLASMA SOURCES;

CORRELATION METHODS; ELECTRIC ARCS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; MAGNETIC ANISOTROPY; MAGNETIC DEVICES; MAGNETIC FIELDS; MAGNETIC FILTERS; PLASMA FLOW; PLASMA SOURCES;

PLASMA DEVICES;

EID: 16244422311     PISSN: 10932941     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DEIV.2004.1422649     Document Type: Conference Paper

References (13)

1. R. L. Boxman et al., "Recent progress in filtered vacuum arc deposition", Surf. Coat. Technol., vol. 86-87, pp. 243-253, 1996.
2. R. L. Boxman, "Recent developments in vacuum arc deposition", IEEE Trans. Plasma Sci., vol 29, pp. 759-761, 2001.
3. Andre Anders, "Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review", Surf. Coat. Technol., vol. 120-121, pp. 319-330, 1999.
4. stInt. Congress on Radiation Physics. Sept. Tomsk, Russia. Proc., vol. 3, pp. 130-138, 2000.
5. I. I. Aksenov, V. M. Khoroshikh, N. S. Lomino, V. D. Ovcharenko, and Yu. A. Zadneprovskiy, "Transformation of axial vacuum-arc plasma flows into radial streams and their use in coating deposition". IEEE Trans. Plasma Sci., vol. 27, pp. 1026-1029, 1999
6. I. I. Aksenov, V. E. Strel'nitskij, V. V. Vasilyev, D. Yu. Zaleskij, "Efficiency of magnetic plasma filters". Surf. Coat. Tech., vol. 163-164, pp. 118-127, 2003.
7. th Int. Symp. Yacuum Techn. Equip., Kharkov, Ukraine, 2001, pp. 139-144.
8. I. I. Aksenov, V. G. Padalka, V. M. Khoroshikh, Formation of metal plasma flows. M., TsNIIatominform, 1984 (Rus.).
9. T. J. Dolan, "Magnetic electrostatic plasma confinement", Plasma Phys. Control. Fusion, vol.36, pp. 1539-1593, 1994.
10. C. W. Kimblin, "A review of arcing phenomena in vacuum and in the transition to atmospheric pressure arcs", IEEE Trans. Plasma Sci., vol. 15, pp. 322-330, 1982.
11. I.I. Aksenov, N. S. Lomino, V. D. Ovcharenko, Yu.A. Zadneprovsky, "Influence of argon on coating deposition rate". Voprosy Atomnoy Nauki i Tekhniki. Ser,: Fizika Radiatsionnykh Povrezhdeniy,. vol. 5, No. 1, pp. 45-51, 1987. (Rus.).
12. A. F. Rogozin, L.Yu. Rusin, Khimicheskaya Fizika, vol. 6, No. 1, pp. 45-51, 1987.
13. I. I. Aksenov, V. V. Bryk, Yu.A. Zadneprovsky, N. S. Lomino, V.D.Ovcharenko, "A study of the system for radial vacuum-arc plasma flow formation". Voprosy Atomnoy Nauki i Techniki. Ser. Fizika Radiatsionnykh Povrezhdeniy,. vol. 1(67), pp. 138-139, 1998 (Rus.}.