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Volumn 2, Issue , 2004, Pages 491-494
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High efficiency filtered vacuum-arc plasma source
a a a a a a b b |
Author keywords
[No Author keywords available]
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Indexed keywords
CATHODE SPOTS (CS);
DRIFT LOSSES;
PLASMA GUIDING CHANNELS;
PLASMA STREAM FOCUSING;
CATHODES;
DIAMOND LIKE CARBON FILMS;
ELECTRIC ARCS;
ELECTRIC CURRENTS;
MAGNETIC FIELDS;
MAGNETIC FILTERS;
SCHEMATIC DIAGRAMS;
THROUGHPUT;
VACUUM;
PLASMA SOURCES;
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EID: 16244405570
PISSN: 10932941
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/DEIV.2004.1422654 Document Type: Conference Paper |
Times cited : (4)
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References (4)
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