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Volumn 9, Issue 12, 2000, Pages 2024-2030

Effect of microwave power on diamond-like carbon films deposited using electron cyclotron resonance chemical vapor deposition

(5) Yoon, S F a Tan, K H a Rusli, a Ahn, J a Huang, Q F a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMONDS; ELECTRON CYCLOTRON RESONANCE; GRAPHITE; HARDNESS; HYDROGEN; INFRARED SPECTROSCOPY; ION BOMBARDMENT; LIGHT EMISSION; MICROWAVES; RAMAN SPECTROSCOPY;

DIAMOND-LIKE CARBON FILMS; OPTICAL EMISSION SPECTROSCOPY; OPTICAL GAP;

OPTICAL FILMS;

EID: 0034544944 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(00)00360-5 Document Type: Article

Times cited : (29)

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