Growth and characterization of diamond films deposited by d.c. discharge assisted hot filament chemical vapor deposition

Thin Solid Films

Volumn 334, Issue 1-2, 1998, Pages 156-160

  Cui, J B ^a   Shang, N G ^a   Liao, Y ^a   Li, J Q ^a   Fang, R C ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Chemical vapor deposition; Diamond growth; Discharge process

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; NUCLEATION; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION; OPTICAL EMISSION SPECTROSCOPY;

DIAMOND FILMS;

EID: 0032483899     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01135-3     Document Type: Article

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