Nanopatterning of silicon with use of self-organized porous alumina and colloidal crystals as mask

Electrochimica Acta

Volumn 52, Issue 8 SPEC. ISS., 2007, Pages 2898-2904

  Ono, Sachiko ^a   Oide, Akihiko ^a   Asoh, Hidetaka ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Anodic porous alumina; Colloidal crystal; Nanopatterning; Self organized material; Silicon

Indexed keywords

ALUMINA; ANODIC OXIDATION; COLLOIDS; CRYSTALLINE MATERIALS; ETCHING; HYDROFLUORIC ACID; NANOSTRUCTURED MATERIALS;

ANODIC POROUS ALUMINA; COLLOIDAL CRYSTALS; NANOPATTERNING; SELF-ORGANIZED MATERIALS;

SILICON;

EID: 33846513406     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2006.08.063     Document Type: Article

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