Heterogeneous integration of semiconducting and carbide nanowires on Si substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6370, Issue , 2006, Pages

  Tsakalakos, Loucas ^a   Taylor, Seth T ^a   Corderman, Reed R ^a   Balch, Joleyn ^a   Fronheiser, Jody ^a  

^a GE GLOBAL RESEARCH   (United States)

Author keywords

Carbides; Integration; Nanowire; Silicon; Vapor phase growth

Indexed keywords

CRYSTAL GROWTH; ELECTRIC PROPERTIES; SEMICONDUCTING SILICON; SEMICONDUCTOR MATERIALS; SUBSTRATES; SYNTHESIS (CHEMICAL);

HETEROGENEOUS INTEGRATION; METAL LINES; VAPOR PHASE GROWTH; VAPOR PHASE SYNTHESIS;

NANOSTRUCTURED MATERIALS;

EID: 33846193252     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.696056     Document Type: Conference Paper

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