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Diamond and Related Materials

Volumn 7, Issue 9, 1998, Pages 1308-1319

Analyses of the Si-C bond in the interface between diamond-like carbon film and silicon wafer

(1) Okada, Morihiro a

a NIPPON STEEL CORPORATION (Japan)

Author keywords

Adhesion; Auger electron spectroscopy; Diamond like carbon; Interfaces

Indexed keywords

ADHESION; AUGER ELECTRON SPECTROSCOPY; CARBON; CHEMICAL BONDS; INTERFACES (MATERIALS); SILICON WAFERS;

CARBON FILMS; DIAMOND-LIKE FILMS;

DIAMOND FILMS;

EID: 0032166298 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(98)00190-3 Document Type: Article

Times cited : (2)

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