SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Applied Physics

Volumn 80, Issue 11, 1996, Pages 6279-6285

Properties of TiN films deposited at low temperature in a new plasma-based deposition system

(4) Hoang, Nguyen Huy a McKenzie, D R a McFall, W D a Yin, Y a

a UNIVERSITY OF SYDNEY (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001167250 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.363704 Document Type: Article

Times cited : (46)

References (43)

1
- 0001898746
- M. Kobayashi and Y. Doi, Thin Solid Films 54, 67 (1978).
- (1978) Thin Solid Films , vol.54 , pp. 67
- Kobayashi, M.¹ Doi, Y.²

2
- 0027836484
- J. B. Price, J. O. Borland, and S. Selbrede, Thin Solid Films 236, 311 (1993).
- (1993) Thin Solid Films , vol.236 , pp. 311
- Price, J.B.¹ Borland, J.O.² Selbrede, S.³

3
- 0025673755
- J. Laimer, Vacuum 40, 27 (1990).
- (1990) Vacuum , vol.40 , pp. 27
- Laimer, J.¹

4
- 0018809450
- B. E. Jacobsson, R. Nimmagadda, and R. F. Bunshah, Thin Solid Films 63, 333 (1979).
- (1979) Thin Solid Films , vol.63 , pp. 333
- Jacobsson, B.E.¹ Nimmagadda, R.² Bunshah, R.F.³

5
- 84930010527
- A. J. Perry, J. Vac. Sci. Technol. A 8, 3186 (1990).
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 3186
- Perry, A.J.¹

6
- 0028486535
- W. Ensinger, M. Kiuchi, and M. Satou, Surf. Coat. Technol. 66, 313 (1994).
- (1994) Surf. Coat. Technol. , vol.66 , pp. 313
- Ensinger, W.¹ Kiuchi, M.² Satou, M.³

7
- 0024052954
- R. C. Ellwanger and J. M. Towner, Thin Solid Films 161, 289 (1988).
- (1988) Thin Solid Films , vol.161 , pp. 289
- Ellwanger, R.C.¹ Towner, J.M.²

8
- 0023452349
- J. A. Sue and H. H. Troue, Surf. Coat. Technol. 33, 169 (1987).
- (1987) Surf. Coat. Technol. , vol.33 , pp. 169
- Sue, J.A.¹ Troue, H.H.²

9
- 0024051440
- F. H. M. Sanders and G. Verspui, Thin Solid Films 161, L87 (1988).
- (1988) Thin Solid Films , vol.161
- Sanders, F.H.M.¹ Verspui, G.²

10
- 22244441685
- J. C. S. Kools, C. J. C. M. Nillesen, S. H. Brongersma, E. van de Riet and J. Dieleman, J. Vac. Sci. Technol. A 10, 1809 (1992).
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 1809
- Kools, J.C.S.¹ Nillesen, C.J.C.M.² Brongersma, S.H.³ Van De Riet, E.⁴ Dieleman, J.⁵

11
- 0000939437
- A. Durandet, R. W. Boswell, and D. R. McKenzie, Rev. Sci. Instrum. 66, 2908 (1995).
- (1995) Rev. Sci. Instrum. , vol.66 , pp. 2908
- Durandet, A.¹ Boswell, R.W.² McKenzie, D.R.³

12
- 5244340635
- R. W. Boswell, Phys. Lett. A 33, 457 (1970).
- (1970) Phys. Lett. A , vol.33 , pp. 457
- Boswell, R.W.¹

13
- 33748751321
- D. R. McKenzie, W. D. McFall, H. Smith, B. Higgins, R. W. Boswell, A. Durandet, B. W. James, and I. S. Falconer, Nucl. Instrum. Methods B 106, 90 (1995).
- (1995) Nucl. Instrum. Methods B , vol.106 , pp. 90
- McKenzie, D.R.¹ McFall, W.D.² Smith, H.³ Higgins, B.⁴ Boswell, R.W.⁵ Durandet, A.⁶ James, B.W.⁷ Falconer, I.S.⁸

14
- 0026120399
- J. Pelleg, L. Z. Zevin, S. Lungo, and N. Croitoru, Thin Solid Films 197, 117 (1991).
- (1991) Thin Solid Films , vol.197 , pp. 117
- Pelleg, J.¹ Zevin, L.Z.² Lungo, S.³ Croitoru, N.⁴

15
- 21544469498
- J. E. Greene, J.-E. Sundgren, L. Hultman, I. Petrov, and D. B. Bergstrom, Appl. Phys. Lett. 67, 2928 (1995).
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2928
- Greene, J.E.¹ Sundgren, J.-E.² Hultman, L.³ Petrov, I.⁴ Bergstrom, D.B.⁵

16
- 0030141507
- W. D. McFall, D. R. McKenzie, and R. P. Netterfield, Surf. Coat. Technol. 81, 72 (1996).
- (1996) Surf. Coat. Technol. , vol.81 , pp. 72
- McFall, W.D.¹ McKenzie, D.R.² Netterfield, R.P.³

17
- 36549097233
- N. Savvides and B. Window, J. Appl. Phys. 64, 225 (1988).
- (1988) J. Appl. Phys. , vol.64 , pp. 225
- Savvides, N.¹ Window, B.²

18
- 0011452946
- T. P. Thorpe, S. B. Qadri, S. A. Wolf, and J. H. Claassen, Appl. Phys. Lett. 49, 1239 (1986).
- (1986) Appl. Phys. Lett. , vol.49 , pp. 1239
- Thorpe, T.P.¹ Qadri, S.B.² Wolf, S.A.³ Claassen, J.H.⁴

19
- 0021192551
- S. Schiller, G. Beister, and W. Sieber, Thin Solid Films 111, 259 (1984).
- (1984) Thin Solid Films , vol.111 , pp. 259
- Schiller, S.¹ Beister, G.² Sieber, W.³

20
- 0022080421
- J.-E. Sundgren, Thin Solid Films 128, 21 (1985).
- (1985) Thin Solid Films , vol.128 , pp. 21
- Sundgren, J.-E.¹

21
- 85010112326
- edited by E. D. Palik Academic, San Diego, Chap. 13
- J. Pflüger and J. Fink, in Handbook of Optical Constants of Solids II, edited by E. D. Palik (Academic, San Diego, 1991), Chap. 13.
- (1991) Handbook of Optical Constants of Solids II
- Pflüger, J.¹ Fink, J.²

22
- 84975657057
- E. Valkonen, C.-G. Ribbing, and J.-E. Sundgren, Appl. Opt. 25, 3624 (1986).
- (1986) Appl. Opt. , vol.25 , pp. 3624
- Valkonen, E.¹ Ribbing, C.-G.² Sundgren, J.-E.³

23
- 0020148298
- P. J. Martin, R. P. Netterfield, and W. G. Sainty, Vacuum 32, 359 (1982).
- (1982) Vacuum , vol.32 , pp. 359
- Martin, P.J.¹ Netterfield, R.P.² Sainty, W.G.³

24
- 84957349754
- P. B. Legrand, J. P. Dauchot, M. Hecq, M. Charbonnier, and M. Romand, J. Vac. Sci. Technol. A 12, 1551 (1994).
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1551
- Legrand, P.B.¹ Dauchot, J.P.² Hecq, M.³ Charbonnier, M.⁴ Romand, M.⁵

25
- 84915405798
- edited by E. Broszeit Informationsgesellschaft, Oberursel 1
- D. S. Rickerby, D. S. Whitnell, and C. F. Ayres, in Plasma Surface Engineering, edited by E. Broszeit (Informationsgesellschaft, Oberursel 1, 1989), Vol. 2, p. 911.
- (1989) Plasma Surface Engineering , vol.2 , pp. 911
- Rickerby, D.S.¹ Whitnell, D.S.² Ayres, C.F.³

26
- 0028076386
- A. Bendavid, P. J. Martin, R. P. Netterfield, and T. J. Kinder, Surf. Coat. Technol. 70, 97 (1994).
- (1994) Surf. Coat. Technol. , vol.70 , pp. 97
- Bendavid, A.¹ Martin, P.J.² Netterfield, R.P.³ Kinder, T.J.⁴

27
- 0000073841
- Ser. A
- G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909).
- (1909) Proc. R. Soc. London , vol.82 , pp. 172
- Stoney, G.G.¹

28
- 0001501099
- H. Ljungcrantz, L. Hultman, J.-E. Sundgren, and L. Karlsson, J. Appl. Phys. 78, 832 (1995).
- (1995) J. Appl. Phys. , vol.78 , pp. 832
- Ljungcrantz, H.¹ Hultman, L.² Sundgren, J.-E.³ Karlsson, L.⁴

29
- 0025701315
- J. Musil, S. Kadlec, V. Valvoda, R. Kuzel, Jr., and R. Cerny, Surf. Coat. Technol. 43/44, 259 (1990).
- (1990) Surf. Coat. Technol. , vol.43-44 , pp. 259
- Musil, J.¹ Kadlec, S.² Valvoda, V.³ Kuzel Jr., R.⁴ Cerny, R.⁵

30
- 0010005593
- D. R. McKenzie, D. Muller, and B. A. Pailthorpe, Phys. Rev. Lett. 67, 773 (1991).
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

31
- 0000535865
- P. J. Martin, R. P. Netterfield, T. J. Kinder, and A. Bendavid, Appl. Opt. 31, 6734 (1992).
- (1992) Appl. Opt. , vol.31 , pp. 6734
- Martin, P.J.¹ Netterfield, R.P.² Kinder, T.J.³ Bendavid, A.⁴

32
- 21844502545
- G. Giroult-Matlakowski, C. Charles, A. Durandet, R. W. Boswell, S. Armand, H. M. Persing, A. J. Perry, P. D. Lloyd, S. R. Hyde, and D. Bogsanyi, J. Vac. Sci. Technol. A 12, 2754 (1994).
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 2754
- Giroult-Matlakowski, G.¹ Charles, C.² Durandet, A.³ Boswell, R.W.⁴ Armand, S.⁵ Persing, H.M.⁶ Perry, A.J.⁷ Lloyd, P.D.⁸ Hyde, S.R.⁹ Bogsanyi, D.¹⁰

33
- 0027578647
- C. A. Davis, Thin Solid Films 226, 30 (1993).
- (1993) Thin Solid Films , vol.226 , pp. 30
- Davis, C.A.¹

34
- 0003484135
- Academic, New York
- L. E. Toth, Transition Metal Carbides and Nitrides (Academic, New York, 1971), p. 7.
- (1971) Transition Metal Carbides and Nitrides , pp. 7
- Toth, L.E.¹

35
- 0028272602
- P. Y. Jouan and G. Lempérière, Thin Solid Films 237, 200 (1994).
- (1994) Thin Solid Films , vol.237 , pp. 200
- Jouan, P.Y.¹ Lempérière, G.²

36
- 21844511798
- J. D. Brown and M. R. Govers, J. Vac. Sci. Technol. A 13, 2328 (1995).
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2328
- Brown, J.D.¹ Govers, M.R.²

37
- 0026899261
- D. Mahéo and J. M. Poitevin, Thin Solid Films 215, 8 (1992).
- (1992) Thin Solid Films , vol.215 , pp. 8
- Mahéo, D.¹ Poitevin, J.M.²

38
- 0022102577
- S. Veprek, Thin Solid Films 130, 135 (1985).
- (1985) Thin Solid Films , vol.130 , pp. 135
- Veprek, S.¹

39
- 0023439871
- D. T. Quinto, G. J. Wolfe, and P. C. Jindal, Thin Solid Films 153, 19 (1987).
- (1987) Thin Solid Films , vol.153 , pp. 19
- Quinto, D.T.¹ Wolfe, G.J.² Jindal, P.C.³

40
- 0024620943
- Y. Andoh, K. Ogata, H. Yamaki, and S. Sakai, Nucl. Instrum. Methods B 39, 158 (1989).
- (1989) Nucl. Instrum. Methods B , vol.39 , pp. 158
- Andoh, Y.¹ Ogata, K.² Yamaki, H.³ Sakai, S.⁴

41
- 0001267864
- D. R. McKenzie, Y. Yin, W. D. McFall, and N. H. Hoang, J. Phys., Condens. Matter. 8, 5883 (1996).
- (1996) J. Phys., Condens. Matter. , vol.8 , pp. 5883
- McKenzie, D.R.¹ Yin, Y.² McFall, W.D.³ Hoang, N.H.⁴

42
- 21844488107
- A. Bendavid, P. J. Martin, X. Wang, M. Wittling, and T. J. Kinder, J. Vac. Sci. Technol. A 13, 1658 (1995).
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 1658
- Bendavid, A.¹ Martin, P.J.² Wang, X.³ Wittling, M.⁴ Kinder, T.J.⁵

43
- 0037997768
- JCPDS International Center for Diffraction Data, Swarthmore, PA
- Powder Diffraction File (JCPDS International Center for Diffraction Data, Swarthmore, PA, 1991).
- (1991) Powder Diffraction File

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.