Simple models for piston-type micromirror behavior

Journal of Micromechanics and Microengineering

Volumn 16, Issue 2, 2006, Pages 303-313

  Miller, M H ^a   Perrault, J A ^b   Parker, G G ^a   Bettig, B P ^a   Bifano, T G ^b  

^a MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; ELECTROSTATIC ACTUATORS; EQUATIONS OF MOTION; LIGHT MODULATORS; MATHEMATICAL MODELS; PISTONS;

DESIGN PARAMETERS; MICROMIRRORS; STATIC DEFLECTION; THIRD-ORDER EQUATION;

MIRRORS;

EID: 31344459832     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/2/015     Document Type: Article

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