Tunable, membrane-based, liquid-filled micro-lenses

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 1018-1021

  Werber, Armin ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Micro fluidics; Micro lenses; Tunable optics

Indexed keywords

LIQUID HANDLING; MICRO-FLUIDICS; MICRO-LENSES; TUNABLE OPTICS;

DRY ETCHING; ELASTOMERS; LIQUID MEMBRANES; MICROELECTROMECHANICAL DEVICES; PRESSURE EFFECTS; SILICON; SPIN COATING;

LENSES;

EID: 27544483710     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496628     Document Type: Conference Paper

References (6)

1. B. Berge, J. Perseux, "Variable focal lens controlled by an external voltage: An application of electrowetting," Eur. Phys., 3, 159-163 (2000).
2. T. Krupenkin, S. Yang, P. Mach, "Tunable liquid microlens," Appl. Physics Letters, 82, 316-318 (2003).
3. H. Ren, Y.-H. Fan, S.-T. Wu, "Liquid-crystal mirolens arrays using patterend polymer networks," Optics Letters, 29, 1608-1610 (2004).
4. J. Chen, W. Wang, J. Fang, K. Varahramyan, "Variable-focusing microlens with microfluidic chip," Micromech. Microeng., 14, 675-680 (2004).
5. Chronis, G. L. Liu, K-H. Jeong, L. P. Lee, "Tunable liquid-filled microlens array integrated with microfluidic network," Optics express, 19, 2370-2378 (2003).
6. D.-Y. Zhang, N. Justis, Y.-H. Lo, "Integrated fluidic adaptive zoom lens," Optics Letters, 29, 2855-2857 (2004).