Tunable, membrane-based, pneumatic micro-mirrors

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 135-136

  Werber, Armin ^a   Zappe, Hans ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Micro mirror; Pneumatic; Tunable optics

Indexed keywords

LASER TUNING; MICROELECTROMECHANICAL DEVICES; PNEUMATIC CONTROL EQUIPMENT; SCANNING;

PNEUMATIC MICROMIRRORS; PNEUMATIC PRESSURE; TUNABLE OPTICS;

MIRRORS;

EID: 33745193459     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540115     Document Type: Conference Paper

References (4)

1. US patent: USS535047A; Hornbeck; "Active yoke hidden hinge digital micromirror device"; Texas instruments INC.
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3. R. A. Miller, Y.-C. Tai, "Micromachined electromagnetic scanning mirrors," Opt. Eng, 36, 1399-1407 (1997).
4. T. Xie, H. Xie, G. K. Fedder, Y., Pan, "Endoscopic optical coherence tomography with new MEMS mirror," Electronics letters, 39, 1535-1536 (2003).