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Volumn 49, Issue 5 I, 2006, Pages 2168-2175

Structural and optical properties of titanium oxide thin films deposited on unheated substrate at different total pressures by reactive dc magnetron sputtering with a substrate bias

(6) Zhou, Wei a Zhong, Xiaoxia a Wu, Xiaochen a Yuan, Luqi a Shu, Qiwei a Xia, Yuxing a

a SHANGHAI JIAO TONG UNIVERSITY (China)

Author keywords

Reactive dc magnetron sputtering; Structural and optical properties; Substrate bias; Titanium oxide thin film

Indexed keywords

EID: 33845659814 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (18)

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