Optical emission diagnostics of the linear magnetron sputtering discharge

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 1076-1082

  Kulakowska Pawlak, B ^a   Zyrnicki, W ^a   Miernik, K ^b   Walkowicz, J ^b  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b NATIONAL RESEARCH INSTITUTE   (Poland)

Author keywords

Linear magnetron sputtering; Optical emission diagnostics

Indexed keywords

ARGON; CATHODES; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; IONIZATION OF GASES; LIGHT EMISSION; MAGNETRON SPUTTERING; NITROGEN; TITANIUM;

OPTICAL EMISSION DIAGNOSTICS;

PLASMA SOURCES;

EID: 0033329720     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00315-1     Document Type: Article

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