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Volumn 2006, Issue , 2006, Pages 1294-1299

10-Gbps signal propagation of high-density wiring interposer using photosensitive polyimide for 3D packaging

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL STRIP-LINE; EYE DIAGRAM MEASUREMENT; HIGH-DENSITY WIRING INTERPOSER; PHOTOSENSITIVE POLYIMIDE FILM;

EID: 33845586076     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2006.1645821     Document Type: Conference Paper
Times cited : (7)

References (15)
  • 1
    • 0034764026 scopus 로고    scopus 로고
    • Interlayer dielectric process for LSI circuits using positive photosensitive polyimide synthesized by block-copolymerization
    • M. Aoyagi, S. Segawa, E. Jung, T. Itatani, M. Komuro, T. Sakamoto, H. Itatani, M. Miyamura, S. Matsumoto, "Interlayer Dielectric Process for LSI Circuits Using Positive Photosensitive Polyimide Synthesized by Block-Copolymerization," Proc. SPIE, vol. 4345 (2001), pp. 1073-1078.
    • (2001) Proc. SPIE , vol.4345 , pp. 1073-1078
    • Aoyagi, M.1    Segawa, S.2    Jung, E.3    Itatani, T.4    Komuro, M.5    Sakamoto, T.6    Itatani, H.7    Miyamura, M.8    Matsumoto, S.9
  • 4
    • 4644306058 scopus 로고    scopus 로고
    • Fabrication of high-density wiring interposer for 10 GHz 3D packaging using a photosensitive multiblock copolymerized polyimide
    • K. Kikuchi, S. Segawa, E. Jung, Y. Nemoto, M. Umemoto, H. Nakagawa, K. Tokoro, M. Aoyagi, "Fabrication of High-Density Wiring Interposer for 10 GHz 3D Packaging Using a Photosensitive Multiblock Copolymerized Polyimide," Jpn. J. Appl. Phys., Vol. 43, No. 7A (2004), pp. 4141-4145.
    • (2004) Jpn. J. Appl. Phys. , vol.43 , Issue.7 A , pp. 4141-4145
    • Kikuchi, K.1    Segawa, S.2    Jung, E.3    Nemoto, Y.4    Umemoto, M.5    Nakagawa, H.6    Tokoro, K.7    Aoyagi, M.8
  • 9
    • 33845592521 scopus 로고    scopus 로고
    • U. S. Patent 5502143
    • H. Itatani et al., U. S. Patent 5502143 (1996).
    • (1996)
    • Itatani, H.1
  • 12
    • 33845579632 scopus 로고    scopus 로고
    • Fabrication process for high-density wiring interposer using photosensitive multiblock copolyimide insulation layers for 3D packaging
    • Singpore, Dec.
    • K. Kikuchi, H. Oosato, S. Ito, S. Segawa, H. Nakagawa, K. Tokoro, M. Aoyagi, "Fabrication Process for High-Density Wiring Interposer Using Photosensitive Multiblock Copolyimide Insulation Layers for 3D Packaging," Proc. 7th Electronics Packaging Technology Conf., Singpore, Dec. 2005, pp. 461-464.
    • (2005) Proc. 7th Electronics Packaging Technology Conf. , pp. 461-464
    • Kikuchi, K.1    Oosato, H.2    Ito, S.3    Segawa, S.4    Nakagawa, H.5    Tokoro, K.6    Aoyagi, M.7


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.