Subsurface reactions of silicon nitride in a highly selective etching process of silicon oxide over silicon nitride

Journal of Applied Physics

Volumn 91, Issue 5, 2002, Pages 3452-3458

  Ito, Masafumi ^a   Kamiya, Kiyoshi ^a   Hori, Masaru ^a   Goto, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33845436392     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1448870     Document Type: Article

References (17)

1. J. W. Coburn, J. Appl. Phys. 50, 5210 (1979).
2. Y. Tu, T. J. Chuang, and H. F. Winters, Phys. Rev. B 23, 823 (1981).
3. S. W. Robey and G. S. Oehrlein, Surf. Sci. 210, 429 (1989).
4. G. S. Oehrlein and H. L. Williams, J. Appl. Phys. 62, 662 (1978).
5. J. W. Butterbaugh, D. C. Gray, and H. Sawin, J. Vac. Sci. Technol. B 9, 1461 (1991).
6. M. Haverlag, D. Vender, and G. S. Oehrlein, Appl. Phys. Lett. 61, 2875 (1992).
7. N. R. Rueger, J. J. Beulens, M. Schaepkens, M. F. Doemling, J. M. Mirza, T. E. F. M. Standaert, and G. S. Oehrlein, J. Vac. Sci. Technol. A 15, 1881 (1997).
8. K. Miyata, M. Hori, and T. Goto, J. Vac. Sci. Technol. A 15, 568 (1997).
9. K. Miyata, M. Hori, and T. Goto, J. Appl. Phys. 82, 4777 (1997).
10. J. Dulak, B. J. Howard, and Ch. Steinbruchel, J. Vac. Sci. Technol. A 9, 775 (1991).
11. T. Sakai, H. Hayashi, J. Abe, K. Horioka, and H. Okano, Proceedings of the Symposium on Dry Process (The Institute of Electrical Engineers of Japan, Tokyo, 1993), p. 193.
12. M. Schaepkens, T. E. F. M. Standaert, N. R. Rueger, P. G. M. Sebel, G. S. Oehrein, and J. M. Cook, J. Vac. Sci. Technol. A 17, 26 (1999).
13. T. Fukasawa, A. Nakamura, H. Shindo, and Y. Horiike, Jpn. J. Appl. Phys., Part 1 33, 2139 (1994).
14. H. Hayashi, K. Kurihara, and M. Sekine, Jpn. J. Appl. Phys., Part 1 35, 2488 (1996).
15. N. Ikegami, A. Yabata, G. L. Liu, H. Uchida, N. Hirashita, and J. Kanamori, Jpn. J. Appl. Phys., Part 1 37, 2337 (1998).
16. M. Inayoshi, M. Ito, M. Hori, T. Goto, and M. Hiramatsu, J. Vac. Sci. Technol. A 16, 233 (1998).
17. A. L. Smith, Spectrochim. Acta 16, 87 (1960).