Absolute density measurement of cyanogen fluoride in CHF3/N2 electron cyclotron resonance plasma using infrared diode laser absorption spectroscopy

Journal of Applied Physics

Volumn 82, Issue 10, 1997, Pages 4777-4780

  Miyata, Koji ^a   Arai, Hiroyoshi ^a   Hori, Masaru ^a   Goto, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ELECTRON CYCLOTRON RESONANCE; ETALONS; ETCHING; INFRARED SPECTROSCOPY; INTEGRATION; LASER BEAMS; PLASMA APPLICATIONS; SILICON NITRIDE; ABSORPTION; CYCLOTRONS; DECAY (ORGANIC); ELECTRIC DISCHARGES; INFRARED LASERS; RESONANCE; SEMICONDUCTOR LASERS; TABLE LOOKUP;

CYANOGEN FLUORIDE; INFRARED DIODE LASER ABSORPTION SPECTROSCOPY; MERCURY CADMIUM TELLURIDE INFRARED DETECTOR; PLASMA DISCHARGE;

DENSITY MEASUREMENT (OPTICAL); ABSORPTION SPECTROSCOPY;

ABSOLUTE DENSITY; DECAY RATE; ECR PLASMA; ELECTRON CYCLOTRON RESONANCE PLASMA; ELECTRON CYCLOTRONS; INFRARED DIODE LASERS; NITROGEN ATOM; VIBRATIONAL LINES;

EID: 0031276893     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366335     Document Type: Article

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