Electron-beam patterning and process optimization for magnetic sensor fabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2940-2944

  Xiao, Shuaigang ^a   Yang, Xiaomin ^a  

^a SEAGATE RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; MAGNETIC DEVICES; MAGNETIC RECORDING; MAGNETORESISTANCE; OPTICAL SENSORS; THIN FILMS;

CHEMICALLY AMPLIFIED RESIST (CAR); ELECTRON-BEAM PATTERNING; ION-BEAM ETCHING;

ELECTRON BEAM LITHOGRAPHY;

EID: 33845274544     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2366699     Document Type: Article

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