Hybrid exposure strategy: Combining e-beam direct writing with optical lithography for magnetic recording heads

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 6, 2005, Pages 2624-2630

  Yang, XiaoMin ^a  

^a SEAGATE RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH-RESOLUTION PATTERNING; MAGNETIC RECORDING HEADS;

MAGNETIC PROPERTIES; PHOTOLITHOGRAPHY; THIN FILMS; THROUGHPUT;

ELECTRON BEAMS;

EID: 29044445777     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2110340     Document Type: Article

References (5)

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