Process considerations for critical features in high areal density thin film magnetoresistive heads: A review

IEEE Transactions on Magnetics

Volumn 35, Issue 2 PART 1, 1999, Pages 806-811

  Fontana Jr , R E ^a   MacDonald, S A ^a   Santini, H A A ^a   Tsang, C ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001022191     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.750649     Document Type: Article

References (11)

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2. R. E. Fontana, Jr., S. A. MacDonald, C. Tsang, T. Lin, "Submicron trackwidth and stripe height MR sensor test structures,", IEEE Transactions on Magnetics, MAG-32, No. 5, pp. 3440-3442, 1996.
3. C. Tsang, M. Chen, T. Yogi, K. Ju, "Gigabit density recording using dual element MR/Inductive heads on thin film disks," IEEE Transactions on Magnetics, MAG-26, No. 5, pp. 1689-1693, 1990.
4. 2 recording demonstrations with dual element heads & thin film disks," IEEE Transactions on Magnetics, MAG-32, No. 1, pp. 7-12, 1996.
5. 2 recording demonstration with converional AMR dual element heads & thin film disks," IEEE Transactions on Magnetics, MAG-33, No. 5, pp. 2866-2871, 1997.
6. Micrograph courtesy of R. Beyers, IBM Research Divison, San Jose, CA 95120
7. T. Lin, C. Tsang, R. E. Fontana, Jr., J. Howard, "Exchange coupled NiFe/FeMn, NiFe/NiMn, and NiO/NiFe films for stabilization of magnetoresistive sensors," IEEE Transactions on Magnetics, MAG-31, No. 6, pp. 2585-2590, 1995.
8. B. Davari, R. Dennard, G. G. Shahidi, "CMOS scaling for high performance and low power - the next ten years," Proceedings of the IEEE, vol. 83, No. 4, pp. 595-606, 1995.
9. Semiconductor Industry Association, 1997.
10. L. F. Thompson, C. G. Willson, M. Bowden, "Introduction to Microlithography", American Chemical Society, Washington, D.C., 1994.
11. S. A. MacDonald, C. Willson, J. Frechet, "Chemical amplification in high resolution imaging systems," Accounts of Chemical Research, vol. 27, No. 6, pp. 151-158, 1994.