A radar for ultra-thin high-k dielectric film: Zero-bias Thermally Stimulated Current Spectroscopy (ZBTSC)

ECS Transactions

Volumn 1, Issue 5, 2006, Pages 577-589

  Lau, W S ^a   Zhang, G ^a   Qian, P W ^a   Leong, L L ^a   Han, T ^b   Che, S T ^c   Wong, Parry ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b LAM RESEARCH CORPORATION   (United States)

^c CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; LEAKAGE CURRENTS; PERMITTIVITY; RADAR; TANTALUM COMPOUNDS;

COULOMB SCATTERING; DEFECT STATES; TANTALUM OXIDE; ZERO-BIAS THERMALLY STIMULATED CURRENT (ZBTSC) SPECTROSCOPY;

DIELECTRIC FILMS;

EID: 33845251817     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2209306     Document Type: Conference Paper

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