Efficient detection of oxygen vacancy double donors in capacitors with ultra-thin Ta2O5 films for DRAM applications by zero-bias thermally stimulated current spectroscopy

Materials Research Society Symposium Proceedings

Volumn 864, Issue , 2005, Pages 99-103

  Lau, W S ^a   Zhong, L ^a   Han, Taejoon ^b   Sandler, Nathan P ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRON TRAPS; LEAKAGE CURRENTS; OXYGEN; SPECTROSCOPIC ANALYSIS; TANTALUM COMPOUNDS;

OXYGEN VACANCY DOUBLE DONORS; THERMALLY STIMULATED CURRENTS;

THIN FILMS;

EID: 30544441585     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-864-e3.2     Document Type: Conference Paper

References (14)

1. I. Asano, Y. Nakamura, M. Hiratani, T. Nabatame, S. Iijima, T. Saeki, T. Futase, S. Yamamoto, T. Saito and T. Sekiguchi, Electronics and Communications in Japan, Part 2 87, 26 (2004).
2. T. Takagoe, Y. Nakamura, K. Kuroki, I. Asano, H. Goto and N. Nakanishi, Jpn. J. Appl. Phys., 43, 3315 (2004).
3. F.G. Ullman, J. Phys. Chem. Solids. 28, 279 (1967).
4. W.S. Lau, T.S. Tan, N.P. Sandler and B.S. Page, Jpn. J. Appl. Phys., 34, 757 (1995).
5. W.S. Lau, L. Zhong, A. Lee, C.H. See, T. Han, N.P. Sandler and T.C. Chong, Appl. Phys. Lett. 71, 500 (1997).
6. W.S. Lau, L.L. Leong, T. Han and N.P. Sandler, Appl. Phys. Lett. 83, 2835 (2003).
7. M. Castagne, J. Bonnafe, J.C. Manifacier and J.P. Fillard, J. Appl. Phys. 51, 4894 (1980).
8. W.S. Lau and T. Han, Appl. Phys. Lett. 86 (2005) 152107.
9. G. Seve and L. Lassabatere, Thin Solid Films 21, 19 (1974).
10. G.S. Oehrlein and A. Reisman, J. Appl. Phys. 54, 6502 (1983).
11. Yasushiro Nishioka, private communication.
12. H. Sawada and K. Kawakami, J. Appl. Phys. 86, 956 (1999).
13. M. Houssa, R. Degraeve, P.W. Mertens, M.M. Heyns, J.S. Jeon, A. Halliyal and B. Ogle, J. Appl. Phys. 86, 6462 (1999).
14. M. Houssa, M. Tuominen, M. Naili, V. Afanas'ev, A. Stesmans, S. Haukka and M.M. Heyns, J. Appl. Phys. 87, 8615 (2000).