Characterization and operation of a mechanically actuated silicon microgripper

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3239-3243

  Blideran, Marius M ^a   Fleischer, Monika ^a   Henschel, Wolfgang ^a   Kern, Dieter P ^a   Sterr, Jochen ^b   Schock, Klaus ^b   Kleindiek, Stephan ^b   Langer, Matthias G ^c   Löffler, Karsten ^c   Grauvogel, Francois ^c  

^a UNIVERSITY OF TÜBINGEN   (Germany)

^b Kleindiek Nanotechnik GmbH   (Germany)

^c UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; MANIPULATORS; MICROMACHINING; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON; THERMAL GRADIENTS;

MICROGRIPPERS; NANOMANIPULATORS; PIEZOACTUATORS;

GRIPPERS;

EID: 33845244171     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2357961     Document Type: Article

References (23)

1. G. Binnig, C. F. Quate, and C. Gerber, Phys. Rev. Lett. 56, 930 (1986).
2. I. Obataya, C. Nakamura, S. W. Han, N. Nakamura, and J. Miyake, Nano Lett. 5, 27 (2005).
3. M. Ueda, Y. Baba, H. Iwasaki, O. Kurosawa, and M. Washizu, Jpn. J. Appl. Phys., Part 1 38, 6568 (1999).
4. G. Hashiguchi and H. Fujita, Proceedings of IEEE Sensors (IEEE, New York, 2002), p. 922.
5. N. Chronis and L. P. Lee, J. Microelectromech. Syst. 14, 857 (2005).
6. N.-T. Nguyen, S.-S. Ho, and C. L.-N. Low, J. Micromech. Microeng. 14, 969 (2004).
7. M. C. Carrozza, A. Menciassi, G. Tiezzi, and P. Dario, J. Micromech. Microeng. 8, 141 (1998).
8. Zyvex NanoEffector Microgripper, http://www.zyvex.com
9. P. Boggild, T. M. Hansen, C. Tanasa, and F. Grey, Nanotechnology 12, 331 (2001).
10. S. Akita, Y. Nakayama, S. Mizooka, Y. Takano, T. Okawa, Y. Miyatake, S. Yamanaka, M. Tsuji, and T. Nosaka, Appl. Phys. Lett. 79, 1691 (2001).
11. P. Kim and C. M. Lieber, Science 286, 2148 (1999).
12. D. Petrovic, G. Popovic, T. Petrovic, A. Schneider, E. Huq, H. Detter, and F. Franek, Proc. SPIE 4928, 63 (2002).
13. S. K. Jericho, M. H. Jericho, T. Hubbard, and M. Kujath, Rev. Sci. Instrum. 75, 1280 (2004).
14. S. Maruo, K. Ikuta, and H. Korogi, Appl. Phys. Lett. 82, 133 (2003).
15. S. Caraffini and J. G. Boyd, Proc. SPIE 3519, 6 (1998).
16. R. von Mises, Z. Angew. Math. Mech. 8, 161 (1928).
17. M. Batista, Arch. Mech. 37, 581 (1985).
18. K. E. Peterson, Proc. IEEE 70, 420 (1982).
19. M. M. Blideran, G. Bertsche, W. Henschel, and D. P. Kern, Microelectron. Eng. 83, 1382 (2006).
20. Kleindiek Micromanipulator, http://www.nanotechnik.com
21. C. Wilson and P. Beck, J. Microelectromech. Syst. 5, 142 (1996).
22. W. Suwito, M. L. Dunn, and S. J. Cunningham, Proceedings of the International Conference on Solid-State Sensors and Actuators (1997), p. 611.
23. F. Pourahmadi, D. Gee, and K. E. Petersen, Proceedings of IEEE Transducers, San Francisco (IEEE, New York, 1991), p. 197.