Magnetically actuated metallic microgripper

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3519, Issue , 1998, Pages 6-12

  Caraffini, Simone ^a   Boyd, James G ^a  

^a 1120 Science and Engineering Offices   (United States)

Author keywords

3 D microfabrication; Magnetic actuator; Microgripper; Nickel activating solution; Nickel electroforming; Polyimide micromolding

Indexed keywords

BOUNDARY VALUE PROBLEMS; CALCULATIONS; ELECTRODEPOSITION; ELECTROFORMING; GRIPPERS; MAGNETIC CIRCUITS; MAGNETIC FIELDS; MATHEMATICAL MODELS; MICROACTUATORS; NICKEL; PHOTOLITHOGRAPHY; POLYIMIDES;

ELECTROMAGNETIC COIL; EULER-BERNOULLI THEORY; MAGNETIC ACTUATOR; MAGNETIC FORCE; MICROGRIPPER; PERMALLOY;

MICROMANIPULATORS;

EID: 0038297321     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.325739     Document Type: Conference Paper

References (5)

1. Kim, C. J., et al., "Silicon-processed overhanging microgripper", J. MEMS, vol.1, no.1, 31-36 (1992)
2. Ballandras, S., et al., "Microgrippers fabricated by the LIGA technique", Sensors and Actuators A, 58 (1997) 265-272
3. Allen, M.G., "Polyimide-based processes for the fabrication of thick electroplated microstructures" Digest Technical Papers-Transducers 93 (Yokohama, Japan) (1993) 60-64
4. Ahn, C., and Allen, M.G., "A fully integrated micromachined magnetic particle manipulator and separator", Proceedings of the IEEE Microelectromechanical Systems Workshop, Oiso, Japan, (1994)
5. John, S. et al., "Activation of nickel for electroforming", Metal finishing, 88 (1990) 39-42