Micro gripper for handling and assembly in MEMS produced by SU8-technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4928, Issue , 2002, Pages 63-72

  Petrovic, Dragan ^a   Popovic, Gordana ^a   Petrovic, Tatjana ^b   Schneider, Andreas ^b   Huq, Ejaz ^b   Detter, Helmut ^a   Franek, Friedrich ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b RUTHERFORD APPLETON LABORATORY   (United Kingdom)

Author keywords

Assembly; Gripper; Handling; MEMS; SU8

Indexed keywords

ASSEMBLY; MATERIALS HANDLING; MEMS;

APPLIED FORCES; FABRICATION METHOD; FUNCTIONAL FEATURES; HANDLING; PARAMETER SETTING; POST-FABRICATION; QUALITY IMPROVEMENT; QUALITY INSPECTION;

GRIPPERS;

EID: 33845236543     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.483150     Document Type: Conference Paper

References (4)

1. D. Petrovic, G. Popovic, E. Chatzitheodoridis, O. Del Medico, A. Almansa, F. Sümecz, W. Brenner, H. Detter, Gripping Tools for Handling and Assembly of Microcomponents, 23th International Conference on Microelectronics, Yugoslavia IEEE Section - EDS/SSC Chapter, Nis, 12-15 May, 2002
2. D. Petrovic, G. Popovic, E. Chatzitheodoridis, O. Del Medico, A. Almansa, H. Detter, W. Brenner, Mechanical gripper system for handling and assembly in MEMS, in Proc. SPIE Micromachining and Microfabrication Process Technology VII, San Franzisko, USA, October 22-24, pp. 151-156, 2001.
3. A. Schneider, DWK Jenkins, RA Moody, GG Arthur, Z Cui, SE Huq, RA Lawes (2000), SU-8 resist and x-ray LIGA technique to produce 1 mm high Ni gear wheels, Microfactory, 2nd Int. Workshop on Microfactories, pp. 141-144, Fribourg, Switzerland, 9-10 Oct. 2000, ed. by FSRM
4. A. Schneider, T. Petrovic, S.E. Huq, D. Petrovic, G. Popovic, Fabrication of Rigid Polymer and Metal Microgrippers Using SU-8 Resist, submitted to Micro- and Nanoengineering 2002, Lugano, Switzerland