A mechanically actuated silicon microgripper for handling micro- and nanoparticles

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1382-1385

  Blideran, Marius M ^a   Bertsche, Günter ^a   Henschel, Wolfgang ^a   Kern, Dieter P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

Bosch deep etch process; FEM simulation; Optical and e beam lithography; Silicon microgripper

Indexed keywords

ACTUATORS; ELECTRIC FIELDS; ETCHING; MECHANICAL PROPERTIES; PHOTOLITHOGRAPHY; SILICON;

BOSCH DEEP ETCH PROCESS; FEM SIMULATION; OPTICAL AND E-BEAM LITHOGRAPHY; SILICON MICROGRIPPER;

NANOSTRUCTURED MATERIALS;

EID: 33646063200     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.054     Document Type: Article

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