Synthesis of 10-μm-thick lead zirconate titanate films on 2-in. Si substrates for piezoelectric film devices

International Journal of Applied Ceramic Technology

Volumn 3, Issue 6, 2006, Pages 442-447

  Iijima, Takashi ^a   Osone, Satoko ^a   Shimojo, Yoshiro ^a   Nagai, Hideki ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; HYSTERESIS; OSCILLATIONS; PIEZOELECTRIC DEVICES; SILICON; SYNTHESIS (CHEMICAL); THICK FILMS;

AUTOMATIC COATING SYSTEM; DISPLACEMENT CURVES; HYSTERESIS CURVES; LEAD ZIRCONATE TITANATE FILMS; PIEZOELECTRIC FILM DEVICES;

LEAD COMPOUNDS;

EID: 33751322146     PISSN: 1546542X     EISSN: 17447402     Source Type: Journal    
DOI: 10.1111/j.1744-7402.2006.02107.x     Document Type: Article

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