Ferroelectric and Piezoelectric Properties of Disk Shape Lead Zirconate Titanate Thick Films

Materials Transactions

Volumn 45, Issue 2, 2004, Pages 233-235

  Iijima, Takashi ^a   Ito, Sachiko ^a   Matsuda, Hirofumi ^a   Dugnani, Robert ^b   Chang, Fu Kuo ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Stanford University   (United States)

Author keywords

Chemical solution deposition; Ferroelectric property; Film; Lead zirconate titanate; Micro fabrication; Micro transducer; Piezoelectric property

Indexed keywords

COERCIVE FORCE; DEPOSITION; FERROELECTRICITY; METALLIC FILMS; PERMITTIVITY; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; REACTIVE ION ETCHING; REMANENCE;

CHEMICAL SOLUTION DEPOSITION; FERROELECTRIC PROPERTY; LEAD ZIRCONATE TITANATE FILMS; MICROFABRICATION; MICROTRANSDUCERS; PIEZOELECTRIC PROPERTY;

THICK FILMS;

EID: 1942444699     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.45.233     Document Type: Article

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