Sidewall surface roughness of sputtered silicon I: Surface modelling

Surface Engineering

Volumn 19, Issue 2, 2003, Pages 97-103

  Ali, M Y ^a   Hung, N P ^b   Ngoi, B K A ^a   Yuan, S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b AGC Paul S Roel Chair in Construction Engineering and Management   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISPERSIVE SPECTROSCOPY; ION BEAMS; MATHEMATICAL MODELS; SILICON; SPUTTERING;

FOCUSED ION BEAM (FIB) SPUTTERING;

SURFACE ROUGHNESS;

EID: 0041807607     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/026708403225002513     Document Type: Article

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