Experimental and finite-element study of convective accelerometer on CMOS

Sensors and Actuators, A: Physical

Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 78-84

  Chaehoi, A ^a   Mailly, F ^a   Latorre, L ^a   Nouet, P ^a  

^a LIRMM   (France)

Author keywords

Accelerometer; CMOS; MEMS; Thermal sensor

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; HEAT TRANSFER; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; OPTIMIZATION; SENSORS; SIGNAL PROCESSING;

THERMAL ACCELEROMETERS; THERMAL SENSOR;

ACCELEROMETERS;

EID: 33751087551     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.057     Document Type: Article

References (16)

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