Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining

Microelectronics Reliability

Volumn 42, Issue 9-11, 2002, Pages 1777-1782

  Dardalhon, M ^a,b   Beroulle, V ^a   Latorre, L ^a   Nouef, P ^a   Perez, G ^b   Nicot, J M ^b   Oudea, C ^c  

^a LIRMM   (France)

^b CNES   (France)

^c AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; MICROMACHINING; SHEAR STRESS;

AGEING TESTS; BULK- MICROMACHINING; CMOS-MEMS; FAILURE MECHANISM; MECHANICAL STRUCTURES; MEMS-STRUCTURE; TEST CHIPS; TEST PLAN;

RELIABILITY ANALYSIS;

EID: 1542359243     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(02)00230-5     Document Type: Conference Paper

References (10)

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