Effect of gas pressure on the sensitivity of a micromachined thermal accelerometer

Sensors and Actuators, A: Physical

Volumn 109, Issue 1-2, 2003, Pages 88-94

  Mailly, Frédérick ^a   Martinez, Alexandre ^a   Giani, Alain ^a   Pascal Delannoy, Frédérique ^a   Boyer, André ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

Accelerometer; Thermal sensor

Indexed keywords

APPROXIMATION THEORY; BOUNDARY LAYERS; CMOS INTEGRATED CIRCUITS; DEFORMATION; ELECTRIC RESISTANCE; HEAT TRANSFER; MATHEMATICAL MODELS; MICROMACHINING; MICROSTRUCTURE; PRANDTL NUMBER; PRESSURE EFFECTS; THERMAL EFFECTS; VECTORS;

GRASHOF NUMBER; THERMAL ACCELEROMETERS; THERMAL SENSORS;

ACCELEROMETERS;

EID: 0942289925     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.09.025     Document Type: Article

References (17)

1. Dauderstädt U.A., de Vries P.H.S., Hiratsuka R., Sarro P.M. Silicon accelerometer based on thermopiles. Sens. Actuators A. 46-47:1995;201-204.
2. Dauderstädt U.A., de Vries P.H.S., Hiratsuka R., Korvink J.G., Sarro P.M., Baltes H., Middelhoek S. Simulation aspects of a thermal accelerometer. Sens. Actuators A. 55:1996;3-6.
3. Dauderstädt U.A., Sarro P.M., French P.J. Temperature dependence and drift of a thermal accelerometer. Sens. Actuators A. 66:1998;244-249.
4. R. Dao, D.E. Morgan, H.H. Kries, D.M. Bachelder, Convective accelerometer and inclinometer, US Patent 5,581,034 (1996).
5. Milanovic V., Bowen E., Zaghloul M.E., Tea N.H., Suehle J.S., Payne B., Gaitan M. Micromachined convective accelerometers in standard integrated circuits technology. Appl. Phys. Lett. 76(4):2000;508-510.
6. V. Milanovic, E. Bowen, N. Tea, J. Suehle, B. Payne, M. Zaghloul, M. Gaitan, Convection-based Accelerometer and Tilt Sensor Implemented in Standard CMOS, International Mechanical Engineering and Exposition, MEMS Symposia, Anaheim, CA, 1998.
7. Leung A.M., Jones J., Czyzewska E., Chen J., Woods B. Micromachined accelerometer based on convection heat transfer. MEMS. 98:1998;627-630.
8. A.M. Leung, J. Jones, E. Czyzewska, J. Chen, M. Pascal, Micromachined accelerometer with no proof mass, Technical Digest of International Electron Device Meeting (IEDM97), 1997, pp. 899-902.
9. Billat S., Glosch H., Kunze M., Hedrich F., Frech J., Auber J., Sandmaier H., Wimmer W., Lang W. Micromachined inclinometer with high sensitivity and very good stability. Sens. Actuators A. 97-98:2002;125-130.
10. Luo X.B., Yang Y.J., Zheng F., Li Z.X., Guo Z.Y. An optimized micromachined convective accelerometer with no proof mass. J. Michromech. Microeng. 11:2001;504-508.
11. Luo X.B., Li Z.X., Guo Z.Y., Yang Y.J. Study on linearity of a micromachined convective accelerometer. Microelectron. Eng. 65:2003;87-101.
12. Mailly F., Giani A., Martinez A., Bonnot R., Temple-Boyer P., Boyer A. Micromachined thermal accelerometer. Sens. Actuators A. 103(3):2003;359-363.
13. F. Mailly, Etude et réalisation de microcapteurs thermiques: anémomètre et accéléromètre thermique, Ph.D. Thesis, Université Montpellier II, France, 2002.
14. J. Taine, J.-P. Petit, Transferts thermiques-Mécanique des fluides anisotropes, Bordas, Paris, France, 1989.
15. x films deposited from silane and ammonia. J. Vac. Sci. Technol. A. 16(4):1998;2003-2007.
16. x/Si substrates for thermal sensor applications. J. Vac. Sci. Technol. A. 20(1):2002;112-116.
17. Mailly F., Giani A., Bonnot R., Temple-Boyer P., Pascal-Delannoy F., Foucaran A., Boyer A. Anemometer with hot platinum thin film. Sens. Actuators A. 94:2001;32-38.