Thermal optimization on micromachined convective accelerometer

Heat and Mass Transfer/Waerme- und Stoffuebertragung

Volumn 38, Issue 7-8, 2002, Pages 705-712

  Luo, X B ^a   Li, Z X ^a   Guo, Z Y ^a   Yang, Y J ^b  

^a TSINGHUA UNIVERSITY   (China)

^b HEBEI SEMICONDUCTOR RESEARCH INSTITUTE   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPUTER SIMULATION; KINEMATICS; MICROMACHINING; OPTIMIZATION; THERMAL DIFFUSION; VISCOSITY;

MICROMACHINED CONVECTIVE ACCELEROMETERS;

HEAT CONVECTION;

EID: 0036692666     PISSN: 09477411     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002310100266     Document Type: Article

References (12)

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10. Micromachined accelerometer with no proof mass
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