Micromachined thermal inclinometer based on flash evaporated Bi 0.5Sb1.5Te3 (p)/Bi2Se 0.3Te2.7(n) thermocouples

Materials Science and Engineering: B

Volumn 107, Issue 1, 2004, Pages 94-98

  Giani, Alain ^a   Mailly, F ^a   Al khalfioui, M ^a   Foucaran, A ^a   Boyer, A ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

Inclinometer; Thermal properties; Thermal sensor; Thermocouple

Indexed keywords

ENERGY UTILIZATION; MICROMACHINING; POLYIMIDES; RESISTORS; THERMOCOUPLES; THERMOELECTRICITY;

INCLINOMETER; THERMAL PROPERTIES; THERMAL SENSORS;

BISMUTH COMPOUNDS;

EID: 1142276042     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2003.10.108     Document Type: Article

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