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Volumn 132, Issue 1 SPEC. ISS., 2006, Pages 129-138

An uncooled infrared focal plane array for low-cost applications fabricated with standard CMOS technology

Author keywords

CMOS infrared imager; Focal plane array; Low cost; Self test; Thermopile; Uncooled detector

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; COSTS; INFRARED IMAGING; MICROMACHINING; VOLTAGE CONTROL;

EID: 33751079662     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.04.027     Document Type: Article
Times cited : (39)

References (14)
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    • Hay, K.A.1    Van Deusen, D.2    Liu, T.Y.3    Kleinhans, W.A.4
  • 7
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    • (1999) Sens. Actuators A , vol.73 , pp. 222-231
    • Oliver, A.D.1    Wise, K.D.2
  • 9
    • 0034868782 scopus 로고    scopus 로고
    • An uncooled microbolometer infrared focal plane array in standard CMOS
    • Tezcan D.S., Eminoglu S., Akar O.S., and Akin T. An uncooled microbolometer infrared focal plane array in standard CMOS. Proc. SPIE 4288 (2001) 112-121
    • (2001) Proc. SPIE , vol.4288 , pp. 112-121
    • Tezcan, D.S.1    Eminoglu, S.2    Akar, O.S.3    Akin, T.4
  • 10
    • 33751072562 scopus 로고    scopus 로고
    • TIMA laboratory, CMP Multi-Project Circuits Service.
    • TIMA laboratory, CMP Multi-Project Circuits Service. http://cmp.imag.fr/products/mems/index.php
  • 11
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    • 120 × 90 element thermopile array fabricated with CMOS technology
    • Hirota M., Nakajima Y., Saito M., Satou F., and Uchiyama M. 120 × 90 element thermopile array fabricated with CMOS technology. Proc. SPIE 4820 (2002) 239-249
    • (2002) Proc. SPIE , vol.4820 , pp. 239-249
    • Hirota, M.1    Nakajima, Y.2    Saito, M.3    Satou, F.4    Uchiyama, M.5
  • 12
    • 0031142859 scopus 로고    scopus 로고
    • Test structures to measure the Seebeck coefficient of CMOS IC polysilicon
    • von Arx M., Paul O., and Baltes H. Test structures to measure the Seebeck coefficient of CMOS IC polysilicon. IEEE Trans. Semicond. Manuf. 10 (1997) 201-208
    • (1997) IEEE Trans. Semicond. Manuf. , vol.10 , pp. 201-208
    • von Arx, M.1    Paul, O.2    Baltes, H.3
  • 13
    • 0034872247 scopus 로고    scopus 로고
    • A self-testable CMOS thermopile-based infrared imager
    • Cannes-Mandelieu, France, April 25-27
    • Charlot B., Parrain F., Mir S., and Courtois B. A self-testable CMOS thermopile-based infrared imager. Proceedings of the DTIP'2001. Cannes-Mandelieu, France, April 25-27 (2001) 96-103
    • (2001) Proceedings of the DTIP'2001 , pp. 96-103
    • Charlot, B.1    Parrain, F.2    Mir, S.3    Courtois, B.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.