A self-testable CMOS thermopile-based infrared imager

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4408, Issue , 2001, Pages 96-103

  Charlot, B ^a   Parrain, F ^a   Mir, S ^a   Courtois, B ^a  

^a TIMA LABORATORY   (France)

Author keywords

Bulk micromachining; Infrared imager; Self test; Thermopiles

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; INFRARED RADIATION; MICROMACHINING; MODULATION; THERMAL CONDUCTIVITY; THERMOCOUPLES; THERMOPILES;

INFRARED IMAGERS; OVERHEATING DETECTION;

INFRARED IMAGING;

EID: 0034872247     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.425341     Document Type: Article

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