Microbolometer production at indigo systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5406, Issue PART 2, 2004, Pages 557-565

  Terre, William ^a   Cannata, Robert ^a   Franklin, Patrick ^a   Gonzalez, Alfrede ^a   Kurth, Eric ^a   Parrish, William ^a   Peters, Kevin ^a   Romeo, Tommie ^a   Salazar, Diane ^a   Vanyssldyk, Robert ^a  

^a FLIR Systems Inc   (United States)

Author keywords

FPA; MEMS; Microbolometer; Uncooled infrared detectors; Vanadium oxide

Indexed keywords

FPA; MICROBOLOMETERS; UNCOOLED INFRARED DETECTORS; VANADIUM OXIDES;

CAMERAS; ELECTRONIC EQUIPMENT; IMAGING SYSTEMS; INFRARED DETECTORS; MICROELECTROMECHANICAL DEVICES; SILICON; VACUUM; VANADIUM;

BOLOMETERS;

EID: 10044242675     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.542766     Document Type: Conference Paper

References (0)