Advanced X-ray analysis techniques to investigate aging of micromachined silicon actuators for space application

Microelectronics Reliability

Volumn 43, Issue 7, 2003, Pages 1099-1103

  Dommann, A ^a   Enzler, A ^a   Onda, N ^a  

^a FHO Fachhochschule Ostschweiz   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AGING OF MATERIALS; MICROMACHINING; QUALITY CONTROL; SPACE APPLICATIONS; X RAY DIFFRACTION;

SILICON ACTUATORS;

SILICON;

EID: 0038789147     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(03)00121-5     Document Type: Conference Paper

References (12)

1. Buser R.A., de Rooij N., Tischhauser H., Dommann A., Staufert G. Biaxial scanning mirror activated by bimorph structures for medical applications. Sensor Actuator. 31(1-3):1992;29-34.
2. Schweitz J.-Å. Mechanical characterization of thin films by micromechanical techniques. MRS Bull. XVII(7):1992;34-45.
3. Vreeland T. Jr., Dommann A., Tsai C.-J., Nicolet M.-A. X-ray diffraction determination of stresses in thin films. Mater. Res. Soc. Symp. Proc. 130:1989;3-12.
4. Mukhamedzhanov E., Kummer M., Dommann A. Triple-crystal diffractometry, X-ray standing wave and reciprocal space mapping study of homoepitaxial grown Si layers. J. Phys. D: Appl. Phys. 33:2000;2087.
5. Afanas'ev A.M., Fanchenko S.S. Acta Cryst. A. 44:1988;25.
6. Iida A., Kohra K. Phys. Stat. Solidi A. 51:1979;533.
7. Lomov A.A., Zaumseil P., Winter U. Acta Cryst. A. 41:1985;223.
8. Batterman B.W. Phys. Rev. Lett. 22:1969;703.
9. Authier A., Gronkowski J., Malgrange C. Acta Cryst. A. 45:1989;432.
10. Afanas'ev A.M., Imamov R.M., Mukhamedzhanov E.Kh. Cryst. Rev. 3:1992;157.
11. Zegenhagen J. Surf. Sci. Rep. 18:1993;199.
12. Bocchi C., Franzosi P., Imamov R.M., Lomov A.A., Maslov A.V., Mukhamedzhanov E.Kh.et al. J. Appl. Phys. 76:1994;7240.