A route to fabricate nanocontacts by X-ray lithography for the realization of single electron transistors and highly sensitive biosensors

Materials Letters

Volumn 60, Issue 29-30, 2006, Pages 3682-3685

  Carrara, Sandro ^a   Ricci, Davide ^a   di Zitti, Ermanno ^a   Di Fabrizio, Enzo ^b,c   Altissimo, Matteo ^c   Tormen, Massimo ^c  

^a UNIVERSITY OF GENOA   (Italy)

^b UNIVERSITY MAGNA GRAECIA OF CATANZARO   (Italy)

^c LABORATORIO TASC   (Italy)

Author keywords

Nanocontacts; Synchrotron radiation source; X ray lithography

Indexed keywords

ATOMIC FORCE MICROSCOPY; BIOSENSORS; ELECTRODES; ELECTRON BEAM LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SYNCHROTRON RADIATION;

NANOCONTACTS; X-RAY LITHOGRAPHY;

TRANSISTORS;

EID: 33751014562     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2006.03.084     Document Type: Article

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