LILIT beamline for soft and deep X-ray lithography at Elettra

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 101-107

  Romanato, Filippo ^a   Di Fabrizio, Enzo ^a   Vaccari, Lisa ^a   Altissimo, M ^a   Cojoc, D ^a,c   Businaro, L ^b   Cabrini, Stefano ^b  

^a SINCROTRONE TRIESTE   (Italy)

^b Ist Di Elettron Stato Solido C   (Italy)

^c UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH PASS FILTERS; LOW PASS FILTERS; MIRRORS; SYNCHROTRON RADIATION;

LITHOGRAPHIC BEAMLINE;

X RAY LITHOGRAPHY;

EID: 0035450646     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00534-2     Document Type: Article

References (14)