Charge trapping and carrier transport mechanism in silicon-rich silicon oxynitride

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 2366-2372

  Yu, Zhenrui ^a   Aceves, Mariano ^a   Carrillo, Jesus ^b   López Estopier, Rosa ^a  

^a INSTITUTO NACIONAL DE ASTROFÍSICA   (Mexico)

^b BENEMÉRITA UNIVERSIDAD AUTÓNOMA DE PUEBLA   (Mexico)

Author keywords

Carrier transport mechanism; Charge trapping; Silicon nanodots; Silicon rich silicon oxynitride

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; NANOSTRUCTURED MATERIALS; TRANSMISSION ELECTRON MICROSCOPY;

CARRIER TRANSPORT; SILICON NANODOTS; SILICON-RICH SILICON OXYNITRIDE;

SILICON COMPOUNDS;

EID: 33750831835     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.04.009     Document Type: Article

References (18)

1. de Ridder R.M., Worhoff K., Driessen A., Lambeck P.V., and Albers H. IEEE J. Sel. Top. Quantum Electron. 4 (1998) 930
2. Worhoff K., Lambeck P.V., de Ridder R.M., and Driessen A. Proceedings IEEE/LEOS Benelux Chapter (1997 Nov. 26), Eindhoven, The Netherlands 153
3. Chung Y., Lee J.C., and Shin H.J. Appl. Phys. Lett. 86 (2005) 022901
4. Yang T., Shen C., Li M.F., Ang C.H., Zhu C.X., Yeo Y.-C., Samudra G., Rustagi S.C., Yu M.B., and Kwong D.-L. IEEE Electron Device Lett. 26 (2005) 826
5. Nakajima A., Ohashi T., Zhu S., Yokoyama S., Michimata S., and Miyake H. IEEE Electron Device Lett. 26 (2005) 538
6. Temple-Boyer P., Hajji B., Alay J.L., Morante J.R., and Martinez A. Sens. Actuators, A, Phys. 74 (1999) 52
7. Morales-Acevedo A., Carrillo-Lopez J., Aceves M., Calleja W., Diaz-Valdes E., Contreras G., and Mejia-Garcia C. Superf. Vacio 9 (1999) 56
8. Modreanu M., Tomozeru N., Cosmin P., and Gartner M. Thin Solid Films 337 (1999) 82
9. Augustine B.H., Hu Y.Z., and Irene E.A. Appl. Phys. Lett. 67 (1995) 3694
10. Habermehl S., and Apodaca R.T. Appl. Phys. Lett. 86 (2005) 072103
11. M. Kevin, Walsh, University of Louisville Standard Operating Procedures, http://mitghmr.spd.louisville.edu/lutz/resources/sops/.
12. Ay F., and Aydinli A. Opt. Mater 26 (2004) 33
13. Pereyra I., and Alayo M.I. Thin Solid Films 402 (2002) 154
14. Nesbit L.A. Appl. Phys. Lett. 46 (1985) 38
15. Chayani M., Caquineau H., Dsepax B., Bandet J., and Berjoan R. Thin Solid Films 471 (2005) 53
16. Yu Z., Aceves M., Carrillo J., and Francisco F. Nanotechnology 14 (2003) 959
17. Agustine B.H., Irene E.A., He Y.J., Price K.J., McNeil L.E., Christensen K.N., and Maher D.M. J. Appl. Phys. 78 (1995) 4020
18. DeSalvo B., Clerc R., Masson P., Ahouassa Y.P., and Ghibaudo G. Proceedings of 29th European Solid State Device Research Conference (ESSDERC'99), Leuven, Belgium (1999 (Sept.)) 168