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Microelectronics Reliability

Volumn 41, Issue 4, 2001, Pages 511-515

Investigation of stress in shallow trench isolation using UV micro-Raman spectroscopy

(5) Dombrowski, K F a Dietrich, B a De Wolf, I b Rooyackers, R b Badenes, G b

a IHP (Germany)

b IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRACK PROPAGATION; DENSIFICATION; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; STRESS ANALYSIS; SUBSTRATES; ULTRAVIOLET SPECTROSCOPY;

MECHANICAL STRESS; MICRO-RAMAN SPECTROSCOPY;

MICROELECTRONICS;

EID: 0035310657 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(00)00260-2 Document Type: Article

Times cited : (13)

References (7)

1
- 0030081591
- (1996) Semicond Sci Technol , vol.11 , pp. 139
- De Wolf, I.¹

2
- 17944384914
- IEDM, Washington, DC
- (1999) Proc 1999 Int Electron Dev Meet , pp. 357
- Dombrowski, K.F.¹ Fischer, A.² Dietrich, B.³ De Wolf, I.⁴ Bender, H.⁵ Pochet, S.⁶ Simons, V.⁷ Rooyackers, R.⁸ Badenes, G.⁹ Stuer, C.¹⁰ Van Landuyt, J.¹¹

3
- 0000349467
- (1999) Appl Phys Lett , vol.75 , pp. 2450
- Dombrowski, K.F.¹ De Wolf, I.² Dietrich, B.³

4
- 0014700507
- (1970) Solid State Commun , vol.8 , pp. 133
- Anastassakis, E.¹ Pinczuk, A.² Burstein, E.³ Pollak, F.H.⁴ Cardona, M.⁵

5
- 0000736871
- (1996) J Appl Phys , vol.79 , pp. 7148
- De Wolf, I.¹ Maes, H.E.² Jones, S.K.³

6
- 0030101072
- (1996) Thin Solid Films , vol.274 , pp. 106
- Atkinson, A.¹ Johnson, T.² Harker, A.H.³ Jain, S.C.⁴

7
- 0006503271
- (1993) J Appl Phys , vol.74 , pp. 4490
- De Wolf, I.¹ Norström, H.² Maes, H.E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.