Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (1 1 0) silicon

Microelectronics Journal

Volumn 37, Issue 11, 2006, Pages 1297-1301

  Jia, Cuiping ^a   Dong, Wei ^a,b   Liu, Caixia ^a   Zhang, Xindong ^a   Zhou, Jingran ^a   Zhong, Zhicheng ^a   Xue, Hailin ^a   Zang, Huidong ^a   Xu, Baokun ^a   Chen, Weiyou ^a  

^a JILIN UNIVERSITY   (China)

^b CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

(1 1 0) silicon; Convex corner; KOH solution; Rhombus compensation

Indexed keywords

ALCOHOLS; ETCHING; SATURATION (MATERIALS COMPOSITION); SEMICONDUCTING SILICON; SOLUTIONS;

CONVEX CORNERS; ETCH PLANES; ISOPROPANOL (IPA) SOLUTION; RESIDUE STRUCTURES; RHOMBUS COMPENSATION;

POTASSIUM COMPOUNDS;

EID: 33750617182     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2006.07.008     Document Type: Article

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