Development of a micro-thermal flow sensor with thin-film thermocouples

Journal of Micromechanics and Microengineering

Volumn 16, Issue 11, 2006, Pages 2502-2508

  Kim, Tae Hoon ^a   Kim, Sung Jin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FLUIDIC DEVICES; NUMERICAL METHODS; QUARTZ; STAINLESS STEEL; THERMOCOUPLES; THIN FILMS;

MICRO THERMAL FLOW SENSOR; QUARTZ WAFER; TEMPERATURE SENSORS; THIN FILM THERMOCOUPLES;

MICROSENSORS;

EID: 33750598537     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/11/035     Document Type: Article

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