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Volumn 44, Issue 9, 2001, Pages 1711-1724

Experimental and numerical analysis of heat transfer phenomena in a sensor tube of a mass flow controller

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MASS TRANSFER; MATHEMATICAL MODELS; SENSORS; TRANSPORT PROPERTIES;

EID: 0035916836     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0017-9310(00)00216-7     Document Type: Article
Times cited : (50)

References (14)
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    • Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller
    • L.D. Hinkle, C.F. Mariano, Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller, J. Vac. Sci. Technol. 9 (1991) 2043-2047.
    • (1991) J. Vac. Sci. Technol. , vol.9 , pp. 2043-2047
    • Hinkle, L.D.1    Mariano, C.F.2
  • 3
    • 0023738204 scopus 로고
    • Characteristics of a thermal gas flowmeter
    • K. Komiya, F. Higuchi, K. Ohtani, Characteristics of a thermal gas flowmeter, Rev. Sci. Instr. 59 (3) (1988) 477-479.
    • (1988) Rev. Sci. Instr. , vol.59 , Issue.3 , pp. 477-479
    • Komiya, K.1    Higuchi, F.2    Ohtani, K.3
  • 4
    • 0032339302 scopus 로고    scopus 로고
    • Design of a new sensor for mass flow controller using thin-film technology based on an analytic thermal model
    • P. Rudent, P. Navratil, Design of a new sensor for mass flow controller using thin-film technology based on an analytic thermal model, J. Vac. Sci. Technol. 16 (1998) 3559-3563.
    • (1998) J. Vac. Sci. Technol. , vol.16 , pp. 3559-3563
    • Rudent, P.1    Navratil, P.2
  • 7
    • 0001463056 scopus 로고
    • Correlating equations for laminar and turbulent convection from a horizontal cylinder
    • S.W. Churchill, H.H.S. Chu, Correlating equations for laminar and turbulent convection from a horizontal cylinder, Int. J. Heat Mass Transfer 18 (1975) 1049-1053.
    • (1975) Int. J. Heat Mass Transfer , vol.18 , pp. 1049-1053
    • Churchill, S.W.1    Chu, H.H.S.2
  • 8
    • 49549139522 scopus 로고
    • Correlating equations for laminar and turbulent free convection from a vertical plate
    • S.W. Churchill, H.H.S. Chu, Correlating equations for laminar and turbulent free convection from a vertical plate, Int. J. Heat Mass Transfer 18 (1975) 1323-1329.
    • (1975) Int. J. Heat Mass Transfer , vol.18 , pp. 1323-1329
    • Churchill, S.W.1    Chu, H.H.S.2
  • 10
    • 84995411902 scopus 로고
    • Visualization of convective heat transfer
    • S. Kimura, A. Bejan, Visualization of convective heat transfer, ASME J. Heat Transfer 105 (1983) 916-919.
    • (1983) ASME J. Heat Transfer , vol.105 , pp. 916-919
    • Kimura, S.1    Bejan, A.2
  • 12
    • 0025470486 scopus 로고
    • Analysis of surface enhancement by a porous substrate
    • K. Vafai, S.J. Kim, Analysis of surface enhancement by a porous substrate, ASME J. Heat Transfer 112 (1990) 700-706.
    • (1990) ASME J. Heat Transfer , vol.112 , pp. 700-706
    • Vafai, K.1    Kim, S.J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.