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Volumn 48, Issue 13, 2005, Pages 2583-2592

Study on the transient characteristics of the sensor tube of a thermal mass flow meter

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; ERRORS; FLOWMETERS; HEAT TRANSFER; MATHEMATICAL MODELS; SENSORS; THERMAL EFFECTS; TRANSIENTS;

EID: 17644378100     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijheatmasstransfer.2005.01.021     Document Type: Article
Times cited : (18)

References (22)
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  • 2
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    • Nguyen, N.T.1
  • 4
    • 0035251622 scopus 로고    scopus 로고
    • Simulation and optimization of a microfluidic flow sensor
    • A. Rasmussen Simulation and optimization of a microfluidic flow sensor Sensor. Actuat. A 88 2001 121 132
    • (2001) Sensor. Actuat. A , vol.88 , pp. 121-132
    • Rasmussen, A.1
  • 5
    • 0030452447 scopus 로고    scopus 로고
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    • Design of a new sensor for mass flow controller using thin-film technology based on an analytic thermal model
    • P. Rudent, and P. Navratil Design of a new sensor for mass flow controller using thin-film technology based on an analytic thermal model J. Vac. Sci. Technol. A 16 6 1998 3559 3563
    • (1998) J. Vac. Sci. Technol. A , vol.16 , Issue.6 , pp. 3559-3563
    • Rudent, P.1    Navratil, P.2
  • 8
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    • U.S. Patent No. 4548075
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    • Mariano1    Charles, F.2
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    • 0000877139 scopus 로고
    • Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller
    • L.D. Hinkle, and C.F. Mariano Toward understanding the fundamental mechanisms and properties of the thermal mass flow controller J. Vac. Sci. Technol. A 9 3 1991 2043 2047
    • (1991) J. Vac. Sci. Technol. A , vol.9 , Issue.3 , pp. 2043-2047
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  • 12
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    • Characteristics of a thermal gas flowmeter
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.