Modified free vibrating beam method for characterization of effective e31 coefficient and leakage resistance of piezoelectric thin films

Review of Scientific Instruments

Volumn 77, Issue 10, 2006, Pages

  Defä, Emmanuel ^a   Zinck, Christophe ^a   Malhaire, Christophe ^b   Baboux, Nicolas ^b   Barbier, Daniel ^b  

^a CEA LETI   (France)

^b UNIVERSITÉ DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC RESISTANCE; ELECTRIC VARIABLES MEASUREMENT; LEAD COMPOUNDS; LEAKAGE CURRENTS; PIEZOELECTRIC MATERIALS; SILICON;

FREE VIBRATING BEAM METHOD; PIEZOELECTRIC THIN FILMS; PIEZOELECTRIC TRANSVERSAL COEFFICIENTS; SILICON BEAMS;

THIN FILMS;

EID: 33750511975     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2360979     Document Type: Conference Paper

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