Raman and infrared spectroscopy studies of carbon nitride films prepared on Si (100) substrates by ion beam assisted deposition

Journal of the Brazilian Chemical Society

Volumn 17, Issue 6, 2006, Pages 1163-1169

  Sucasaire, Wilmer ^a   Matsuoka, Masao ^a   Lopes, Karina C ^a   Mittani, Juan C R ^a   Avanci, Luis H ^a   Chubaci, Jose F D ^a   Added, Nemitala ^a   Trava, Vladimir ^a   Corat, Evaldo J ^b  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

Carbon nitride; Infrared spectroscopy; Ion beam deposition; Raman spectroscopy

Indexed keywords

EID: 33750489026     PISSN: 01035053     EISSN: 01035053     Source Type: Journal    
DOI: 10.1590/S0103-50532006000600014     Document Type: Conference Paper

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